Volatile fluorinated compounds such as nitrogen trifluoride (NF3), tetrafluoromethane (CF4), sulfur hexafluoride (SF6), and trifluoromethyl sulfur pentafluoride (SF5CF3) are chemically very stable, resulting in long atmospheric lifetimes on the order of hundreds of years. They are also very effective in absorbing energy in the infrared band. As a result, they are potent greenhouse gases and can have a strong impact on the global climate even at very low concentrations. Large amounts of these gases are used by the semiconductor industry, but the emissions are not well quantified. In the case